Title of the book: Fundamentals of Semiconductors
Fabrication
Authors:, Grary S. May and Simon M. Sze
Edition:
Publishers: WILEY
ISBN: 0-471-23279-3
Pages: 316
Chapters: 11
Files type: PDF
File size: 35.2 MB
Contents:
Introduction
Crystal Growth
Silicon Oxidation
Photolithography
Etching
Diffusion
Ion Implantation
Film Deposition
Process Integration
IC Manufacturing
Future Trends and Challenges
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